| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037349 | Thin Solid Films | 2013 | 30 Pages |
Abstract
⺠Hydrogenated amorphous carbon (a-C:H) films were deposited at atmospheric pressure. ⺠Effect of dilution gas on film properties and chemical composition is investigated. ⺠The films deposited in nitrogen dilution contained nitrogen (a-C:H:N). ⺠As C2H2 gas ratio decreased, nitrogen incorporation into films was induced. ⺠a-C:H was harder and smoother than a-C:H:N and maximum hardness of a-C:H was 1.1 GPa.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Mayui Noborisaka, Ryohei Horikoshi, So Nagashima, Akira Shirakura, Tetsuya Suzuki,