Article ID Journal Published Year Pages File Type
8037361 Thin Solid Films 2013 4 Pages PDF
Abstract
► The surface density of SiC nanodots can be controlled by the surface contamination. ► The shape of the SiC nanodots can be defined by Si crystalline orientations. ► The orientation of the SiC nanodots can be defined by Si crystalline orientation. ► The Si contamination can be controlled by scanning electron microscopy irradiation.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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