Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037372 | Thin Solid Films | 2013 | 6 Pages |
Abstract
⺠We report Ga-doped In-Sn-O films for a pixel electrode in liquid crystal display. ⺠Ga-doped In-Sn-O films show phase transition behavior at 210 °C. ⺠Ga-doped In-Sn-O films show high wet etchability and low resistivity.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J.H. Choi, S.H. Kang, H.S. Oh, T.H. Yu, I.S. Sohn,