Article ID Journal Published Year Pages File Type
8037372 Thin Solid Films 2013 6 Pages PDF
Abstract
► We report Ga-doped In-Sn-O films for a pixel electrode in liquid crystal display. ► Ga-doped In-Sn-O films show phase transition behavior at 210 °C. ► Ga-doped In-Sn-O films show high wet etchability and low resistivity.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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