Article ID Journal Published Year Pages File Type
8037393 Thin Solid Films 2013 6 Pages PDF
Abstract
► Microstructures of glancing angle deposited (GLAD) layers are categorized. ► The microstructure changes qualitatively with increasing homologous temperature. ► Of key importance is the competition between surface diffusion and atomic shadowing. ► GLAD yields a direct transition from Zone I to Zone III of the structure zone model. ► Transitions from rods to columns to protrusions to equiaxed grains with whiskers
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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