Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037451 | Thin Solid Films | 2013 | 5 Pages |
Abstract
⺠Small oxygen doping can increase residual compressive stress in Mo films. ⺠Substrate bias during deposition impacts stress in Mo and MoOx films. ⺠Stress distribution and microstructure linked to oxygen concentration in the film.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J.-Y. Faou, E. Barthel, S.Y. Grachev,