| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037469 | Thin Solid Films | 2013 | 5 Pages |
Abstract
⺠A report on rf magnetron sputtering of low loss α-Mg2SiO4 thin films ⺠Sensitivity of working pressure; producing α-Mg2SiO4 only at low pressures ⺠Crystallization of randomly-oriented α-Mg2SiO4 above 500 °C with distinct grains ⺠Obtaining very low dielectric loss of < 0.3% with the least frequency dependency ⺠Demonstrating an example of multilayer thin film hybrids with α-Mg2SiO4
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Chan Su Han, Bhaskar Chandra Mohanty, Chong Yun Kang, Yong Soo Cho,