Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037560 | Thin Solid Films | 2013 | 4 Pages |
Abstract
⺠We report property variation of UV-treated ZnO-based thin film transistors. ⺠Near UV-treatment results in reversible and fast electrical property variation. ⺠Near UV-treatment does not induce spectroscopic changes in both ZnO and SiNx. ⺠Deep UV-treatment results in irreversible and slow property variation. ⺠Deep UV-treatment induces spectroscopic changes in both ZnO and SiNx.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Sun Moon Jin, Nam-Ihn Cho, Eui-Jung Yun, Hyoung Gin Nam,