Article ID Journal Published Year Pages File Type
8037560 Thin Solid Films 2013 4 Pages PDF
Abstract
► We report property variation of UV-treated ZnO-based thin film transistors. ► Near UV-treatment results in reversible and fast electrical property variation. ► Near UV-treatment does not induce spectroscopic changes in both ZnO and SiNx. ► Deep UV-treatment results in irreversible and slow property variation. ► Deep UV-treatment induces spectroscopic changes in both ZnO and SiNx.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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