| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037573 | Thin Solid Films | 2013 | 5 Pages |
Abstract
⺠We investigate the incorporation of iron atoms during nano-patterning of Si surfaces. ⺠Pattern formation occurs when the areal density of Fe exceeds a certain threshold. ⺠X-ray reflectivity shows a layering at near surface due to incorporated Fe atoms. ⺠It is shown that the patterning is accompanied with the appearance of Fe-rich silicide.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
B. Khanbabaee, B. Arezki, A. Biermanns, M. Cornejo, D. Hirsch, D. Lützenkirchen-Hecht, F. Frost, U. Pietsch,