| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037578 | Thin Solid Films | 2013 | 4 Pages |
Abstract
⺠Sol-gel derived defect free thin films of Ta2O5 ⺠Amorphous ⺠Very low permeation for gases ⺠Only 30-40 nm ultrathin films ⺠Chemically, thermally and hydrothermally stable
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
M.J. Wolf, S. Roitsch, J. Mayer, A. Nijmeijer, H.J.M. Bouwmeester,