Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037626 | Ultramicroscopy | 2018 | 7 Pages |
Abstract
In this paper we present design and application of novel piezoresistive scanning thermal microscopy (SThM) probes. The proposed probe integrates a piezoresistive deflection sensor and thermally active, resistive nanosize tip. Manufacturing technology includes standard silicon MEMS/CMOS processing and sophisticated postprocessing using Focus Ion Beam milling. Authors also describe dedicated measurement technique in order to perform quantitative nanoscale thermal probing. Performance of the developed thermal probes is validated by test scans (topography and temperature distribution) of silicon nanoresistors supplied with current.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
PaweÅ Janus, Andrzej Sierakowski, Maciej Rudek, Piotr Kunicki, Andrzej Dzierka, PaweÅ Biczysko, Teodor Gotszalk,