Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037716 | Ultramicroscopy | 2018 | 9 Pages |
Abstract
In quantitative scanning transmission electron microscopy (STEM), scattering cross-sections have been shown to be very sensitive to the number of atoms in a column and its composition. They correspond to the integrated intensity over the atomic column and they outperform other measures. As compared to atomic column peak intensities, which saturate at a given thickness, scattering cross-sections increase monotonically. A study of the electron wave propagation is presented to explain the sensitivity of the scattering cross-sections. Based on the multislice algorithm, we analyse the wave propagation inside the crystal and its link to the scattered signal for the different probe positions contained in the scattering cross-section for detector collection in the low-, middle- and high-angle regimes. The influence to the signal from scattering of neighbouring columns is also discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
G.T. Martinez, K.H.W. van den Bos, M. Alania, P.D. Nellist, S. Van Aert,