Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037722 | Ultramicroscopy | 2018 | 9 Pages |
Abstract
In our previous works, we have proposed N-SYLC (N-fold symmetric line currents) models for aberration correction. In this paper, we propose “in-lens N-SYLC” model, where N-SYLC overlaps rotationally symmetric lens. Such overlap is possible because N-SYLC is free of magnetic materials. We analytically prove that, if certain parameters of the model are optimized, an in-lens 3-SYLC (Nâ¯=â¯3) doublet can correct 3rd order spherical aberration. By computer simulation, we show that the required excitation current for correction is less than 0.25 AT for beam energy 5â¯keV, and the beam size after correction is smaller than 1â¯nm at the corrector image plane for initial slope less than 4 mrad.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Shahedul Hoque, Hiroyuki Ito, Ryuji Nishi,