| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8038270 | Ultramicroscopy | 2014 | 6 Pages |
Abstract
A novel field-emission SEM column has been developed that features Beam Deceleration Mode, high-probe current and ultra-fast scanning. New detection system in the column is introduced to detect true secondary electron signal. The resolution power at low energy was doubled for conventional SEM optics and moderately improved for immersion optics. Application examples at low landing energies include change of contrast, imaging of non-conductive samples and thin layers.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jaroslav Jiruše, Miloslav Havelka, Filip Lopour,