| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8038362 | Ultramicroscopy | 2014 | 6 Pages |
Abstract
To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
O. ShánÄl, J. Zlámal, M. Oral,