Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8039422 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2018 | 5 Pages |
Abstract
This work reports on the induced diamond crystal amorphization by 4â¯MeV carbon ions implanted in the ã1â¯0â¯0ã oriented crystal and its determination by application of RBS/C and EBS/C techniques. The spectra from the implanted samples were recorded for 1.2, 1.5, 1.75 and 1.9â¯MeV protons. For the two latter ones the strong resonance of the nuclear elastic scattering 12C(p,p0)12C at 1.737â¯MeV was explored. The backscattering channeling spectra were successfully fitted and the ion beam induced crystal amorphization depth profile was determined using a phenomenological approach, which is based on the properly defined Gompertz type dechanneling functions for protons in the ã1â¯0â¯0ã diamond crystal channels and the introduction of the concept of ion beam amorphization, which is implemented through our newly developed computer code CSIM.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Erich, M. Kokkoris, S. FaziniÄ, S. PetroviÄ,