Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8039537 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 6 Pages |
Abstract
In this paper we present our recent results related to nanoscale imaging using such table-top and desk-top EUV/SXR microscopes. Their construction is based on a double stream gas puff target laser plasma source. The double stream gas puff target EUV and SXR sources, coupled with Fresnel zone plates (FZPs) represent a suitable platform for microscopy experiments in transmission mode, employing SXR and EUV radiation. It represents a possible complementary technique to synchrotrons and free-electron laser facilities. The sources, which are very easy to be used by a single user, allow for efficient generation of plasma radiation with high SXR/EUV flux. Presented herein compact microscopes, based on that source, allow one to capture SXR and EUV images of various samples, with 50-60Â nm half-pitch spatial resolution (corresponding to a Rayleigh resolution of 100-120Â nm) and exposure time of the order of few seconds. Thus, herein, we would like to present our recent developments and progress in compact desk-top SXR/EUV microscopy employing laser plasma gas puff target sources, showing examples of acquired images and possible applications.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Alfio Torrisi, Przemyslaw W. Wachulak, Andrzej Bartnik, Åukasz WÄgrzyÅski, Tomasz Fok, Henryk Fiedorowicz,