| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8040924 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2015 | 4 Pages |
Abstract
The experimental angular distributions of atoms sputtered from polycrystalline W, Cd and Ni based alloys with 10Â keV Ar cluster ions are presented. RBS was used to analyze a material deposited on a collector. It has been found that the mechanism of sputtering, connected with elastic properties of materials, has a significant influence on the angular distributions of sputtered components. The effect of non-stoichiometric sputtering at different emission angles has been found for the alloys under cluster ion bombardment. Substantial smoothing of the surface relief was observed for all targets irradiated with cluster ions.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
A.E. Ieshkin, Yu.A. Ermakov, V.S. Chernysh,