Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8040936 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2015 | 4 Pages |
Abstract
A compact high-resolution elastic recoil detection analysis (ERDA) system was developed for precise Li analysis. 200-400Â keV He+ ions were used as primary ions and the energy spectra of recoiled Li ions were measured using a magnetic spectrometer. Due to its dispersion the background originating from the scattered primary ions is reduced. The recoiled ions of the substrate other than Li, which may also contribute to the background, were rejected by a thin mylar foil placed in front of a focal plane detector. An electrostatic quadrupole lens was installed at the entrance of the magnetic spectrometer to improve the depth resolution by correcting the effect of the kinematic broadening. The performance of the developed high-resolution ERDA was examined by measuring several samples. A thin Li layer (1.5Â ÃÂ 1015Â cmâ2) deposited on a graphite surface was clearly observed and the detection limit was estimated to be less than 0.01Â ML under typical measurement conditions. The depth resolution was estimated to be 0.5Â nm at the surface and was better than 3Â nm in the surface region within 5Â nm from the surface.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Masataka Nikko, Kaoru Nakajima, Kenji Kimura,