| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8041475 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2014 | 5 Pages |
Abstract
SIMNRA is an analytical code for the simulation of ion beam analysis energy spectra obtained by Rutherford backscattering, non-Rutherford scattering, elastic recoil detection analysis, and nuclear reaction analysis. Improvements of the simulation physics in SIMNRA version 7 include among others the skewness of all energy spread distributions, improved handling of scattering or reaction cross-sections with structure, generalized layer roughness, and sample porosity.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Mayer,