Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8041528 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2014 | 4 Pages |
Abstract
We have successfully fabricated novel microscopic imaging devices made from UV/EB curable resin using an external scanning proton microbeam. The devices are micro-structured fluorescent plates that consist of an array of micro-pillars that align periodically. The base material used in the pillars is UV/EB curable resin and each pillar contains phosphor grains. The pattern exposures were performed using a proton beam writing technique. The height of the pillars depends on the range of the proton beam. Optical microscopy and scanning electron microscopy have been used to characterize the samples. The results show that the fabricated fluorescent plates are expected to be compatible with both spatial resolution and detection efficiency.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
T. Sakai, R. Yasuda, H. Iikura, T. Nojima, M. Koka, T. Satoh, Y. Ishii, A. Oshima,