Time-of-flight ERD with a 200Â mm2 Si3N4 window gas ionization chamber energy detector

In this paper the construction and operation of an isobutane filled gas ionization chamber with a 14 × 14 mm2 100 nm thick silicon nitride window are described. In addition to greatly improved energy resolution for heavy ions, the detector is also able to detect hydrogen recoils simultaneously in the energy range of 100-1000 keV. Additionally the detector has position sensitivity by means of timing measurement, which can be performed without compromising the performance of the detector in any other way. The achieved position sensitivity improves the depth resolution near the surface.