| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8041642 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2014 | 4 Pages |
Abstract
Various applications will be presented ranging from thin film analysis for composition, contamination detection, surface area measurements and doping level to characterisation of diffusion mechanisms. Aspects of analytical performance with regards to sensitivity, quantification, repeatability and sample throughput will be discussed.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Agnès Tempez, Sébastien Legendre, Patrick Chapon,