Exploring cryogenic focused ion beam milling as a Group III-V device fabrication tool

In this paper, we compare the features observed on a Group III-V strained layer superlattice (SLS) materials system as a result of room temperature Ga+ focused ion beam (FIB) milling to the features observed as a result of cryogenic FIB (cryo-FIB) milling at -135 °C under the same beam conditions (30 kV:1 nA). The features on the cryo-FIB milled material were observed both when the material was still cold and after it returned to room temperature. Although cryo-FIB milling yielded patterned features that were initially cleaner than comparable features defined by FIB milling at room temperature, we found that both room temperature FIB milling and cryo-FIB milling with subsequent sample warm-up resulted in the formation of Group III enriched features. These findings suggest that the structural and chemical properties of features fabricated by cryo-FIB milling are temperature-dependent, which is an important consideration when it comes to device fabrication. These dependencies will need to be better understood and controlled if cryo-FIB milling is to have future applications in this area.