Structural and elemental X-ray microanalysis with synchrotron radiation in confocal geometry

A spectrometer for 3D structural and multielemental X-ray microanalysis with synchrotron radiation is presented in this work. It is based on the combination of the energy dispersive X-ray fluorescence and diffraction with polycapillary optics. The 3D spatial resolution was achieved by the superposition of the foci of two lenses arranged in confocal geometry. The parameters that affect the performance of the spectrometer were study in detail giving rise to a simplified calibration method for depth profile analysis. Two specific examples were included to illustrate the use of the spectrometer in order to identify their possible application fields.