Article ID Journal Published Year Pages File Type
8042439 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 4 Pages PDF
Abstract
We study the surface topography and swelling of GaN irradiated at room temperature with 1.3 keV/amu F, P, PF2, and PF4 ions. These irradiation conditions reveal the effect of the collision cascade density on ion-induced swelling and roughening of the GaN surface. Results show that, for F and P ions that create dilute collision cascades, swelling dominates erosion. In the case of molecular ion irradiation, characterized by larger cascade densities, surface erosion dominates swelling. For the conditions studied, surface roughness scales with the thickness of surface amorphous layers when these layers are thinner than about 20 nm.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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