Article ID Journal Published Year Pages File Type
8042440 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 4 Pages PDF
Abstract
The paper is devoted to the study of erosion processes on a metal surface (Ag, Ni, Cu, W) under argon ion bombardment. The erosion yields including the sputtered and evaporated particles have been calculated for a wide range of the initial ion energy (1-1000 keV). They are revealed to reach the values from units to 104 atom/ion under a pulsed ion beam with the power density of 102-1010 W/cm2. The ion beam and target parameters are shown to influence on the erosion intensity.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
, , ,