Article ID Journal Published Year Pages File Type
8042900 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 11 Pages PDF
Abstract
We present a mathematical model describing surface modification resulting from atomic motion after ion bombardment. The model considers only the defect production and recovery process induced by the local atom rearrangement and is essentially independent of surface topography changes formed by both sputtering and surface diffusion. A stable analytic, travelling wave solution is presented for a specific incident angle, which agrees with experimental observation excellently.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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