Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8042900 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2013 | 11 Pages |
Abstract
We present a mathematical model describing surface modification resulting from atomic motion after ion bombardment. The model considers only the defect production and recovery process induced by the local atom rearrangement and is essentially independent of surface topography changes formed by both sputtering and surface diffusion. A stable analytic, travelling wave solution is presented for a specific incident angle, which agrees with experimental observation excellently.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Satoshi Numazawa, Roger Smith,