Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8043117 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2013 | 6 Pages |
Abstract
Recently we also explored novel techniques for additional sulfur suppression already in the ion source. While results with a small gas reaction cell in front of the sputter target were discouraging, a decrease in the sulfur/chlorine ratio by one order of magnitude was achieved by directing 300Â mW continuous wave laser beam at 445Â nm towards the cathode in the ion source.
Related Topics
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Materials Science
Surfaces, Coatings and Films
Authors
Martin Martschini, Pontus Andersson, Oliver Forstner, Robin Golser, Dag Hanstorp, Anton O. Lindahl, Walter Kutschera, Stefan Pavetich, Alfred Priller, Johan Rohlén, Peter Steier, Martin Suter, Anton Wallner,