| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8043117 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2013 | 6 Pages |
Abstract
Recently we also explored novel techniques for additional sulfur suppression already in the ion source. While results with a small gas reaction cell in front of the sputter target were discouraging, a decrease in the sulfur/chlorine ratio by one order of magnitude was achieved by directing 300Â mW continuous wave laser beam at 445Â nm towards the cathode in the ion source.
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Authors
Martin Martschini, Pontus Andersson, Oliver Forstner, Robin Golser, Dag Hanstorp, Anton O. Lindahl, Walter Kutschera, Stefan Pavetich, Alfred Priller, Johan Rohlén, Peter Steier, Martin Suter, Anton Wallner,