Article ID Journal Published Year Pages File Type
8043888 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2012 12 Pages PDF
Abstract
In the present contribution the state of the art of damage evolution and amorphization occurring at temperatures equal to and below room temperature in covalent and ionic-covalent semiconductors is summarized and possible mechanisms are discussed to understand the experimental results.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Damage evolution and amorphization in semiconductors under ion irradiation
Authors
, , ,