Article ID Journal Published Year Pages File Type
8043987 Vacuum 2018 40 Pages PDF
Abstract
We report the room temperature detection of low concentration (few hundred ppm) of hydrogen using sputtered tin oxide (SnO2) thin films catalyzed by ultra-thin layer of platinum (Pt), followed by argon annealing at different temperatures from 150 °C to 600 °C. Structural, morphological, optical, compositional, and gas sensing properties of the fabricated films were investigated. The results show that the gas sensing properties of the heated Pt/SnO2 sensors at room temperature was enhanced as compared to the as-deposited Pt/SnO2, and pristine SnO2 sensors. The maximum response is observed at the post-annealing in the temperature range between 150 and 300 °C. In particular, the sensor annealed at 150 °C, show excellent response, high selectivity, reasonable response and recovery time, as well as high long-term stability for hydrogen detection at room temperature. A plausible mechanism for the observed enhancement in the sensing performance towards hydrogen is proposed.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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