| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8044051 | Vacuum | 2018 | 5 Pages |
Abstract
The paper demonstrates the possibility to synthesize boron-containing coatings through magnetron sputtering of crystalline boron targets at a frequency of several hundred kilohertz, which is much lower compared to rf magnetrons, and presents research data on the surface profile of such coatings deposited in different reactive (air, N2, O2) gases.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
E.M. Oks, A.V. Tyunkov, Yu.G. Yushkov, D.B. Zolotukhin,