| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8044372 | Vacuum | 2018 | 10 Pages |
Abstract
It has been found that the erosion coefficients of metal targets at evaporation reach several tens of atoms per ion, which is an order of magnitude higher than the sputtering yield. Due to this, the coatings deposition under self-sputtering conditions takes place without reducing a deposition rate as compared to the case with sputtering gas.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
G.A. Bleykher, A.V. Yuryeva, A.S. Shabunin, V.P. Krivobokov, D.V. Sidelev,