Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8044426 | Vacuum | 2018 | 16 Pages |
Abstract
- NiO films were sputtered by magnetron sputtering at different growth temperature.
- The growth temperature is critical to effect the physical properties of NiO films.
- The quality of NiO films presented significant improvements with proper growth temperature.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Yang Zhao, Hui Wang, Fan Yang, Zhiqiang Zhen, Xinzhong Li, Qiuze Li, Jingjie Li,