Article ID Journal Published Year Pages File Type
8044426 Vacuum 2018 16 Pages PDF
Abstract

- NiO films were sputtered by magnetron sputtering at different growth temperature.
- The growth temperature is critical to effect the physical properties of NiO films.
- The quality of NiO films presented significant improvements with proper growth temperature.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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