Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8045287 | Vacuum | 2014 | 5 Pages |
Abstract
A linearity test of the quadrupole mass spectrometer signal can be performed by using the pressure generated by the flow rate of a secondary leak as a fix point and varying the flow rate by a primary gas flowmeter around this value. Applying this method, we have investigated three different quadrupole mass spectrometer in a range of helium partial pressures between 10â9 Pa and 10â4 Pa, corresponding to flow rates of 10â7 Pa L sâ1 to 10â2 Pa L sâ1 in our system. Our preliminary results indicate significant non-linearities for even modest partial pressure changes.
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Authors
Ute Becker, Karl Jousten,