Article ID Journal Published Year Pages File Type
8045310 Vacuum 2013 5 Pages PDF
Abstract
► Monte Carlo simulations of electrons propagation in water vapor. ► Follow the beam profile at low energy in environmental scanning electron microscopy. ► The skirt extend is mainly function of working distance. ► The ionization and excitation events are independent of energy in the 1-5 keV range.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Monte Carlo simulation of the electron beam scattering under water vapor environment at low energy
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