| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8045392 | Vacuum | 2013 | 4 Pages |
Abstract
We investigated the irradiation effects of a water cluster ion beam on a PMMA surface. The incident angle dependence of the sputter depth of the PMMA surface induced by the irradiation of a water cluster ion beam was measured. The sputter depth had a broad peak around the incident angle of 60°. The surface roughness caused by the irradiation of the water cluster ion beam was small compared with the sputter depth.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Hiromichi Ryuto, Gaku Ichihashi, Mitsuaki Takeuchi, Gikan H. Takaoka,