Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8045404 | Vacuum | 2013 | 4 Pages |
Abstract
⺠Minimum separation of cathode walls for atmospheric plasma ignition depends on gas. ⺠Minimum separation of cathode walls to ignite plasma depends on type of generation. ⺠Minimum wall separation broader for molecular gases both for rf and pulsed dc powers. ⺠Minimum wall separation to ignite plasma smaller for pulsed dc than for rf power. ⺠Plasma reactor design and type of plasma generation affect plasma-chemical processes.
Keywords
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Authors
Hana Baránková, Ladislav Bárdos,