Article ID Journal Published Year Pages File Type
8045404 Vacuum 2013 4 Pages PDF
Abstract
► Minimum separation of cathode walls for atmospheric plasma ignition depends on gas. ► Minimum separation of cathode walls to ignite plasma depends on type of generation. ► Minimum wall separation broader for molecular gases both for rf and pulsed dc powers. ► Minimum wall separation to ignite plasma smaller for pulsed dc than for rf power. ► Plasma reactor design and type of plasma generation affect plasma-chemical processes.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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