Article ID Journal Published Year Pages File Type
8045421 Vacuum 2013 4 Pages PDF
Abstract
► Inductively coupled plasma enhances thermal CVD deposition rates of carbon coatings. ► Increasing the deposition rate reduces the ordered degree of carbon coatings. ► The structure of carbon coatings shifts to graphite-like with increasing rf-powers.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Effects of radio-frequency powers on the properties of carbon coatings on optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma
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