| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8045471 | Vacuum | 2013 | 5 Pages |
Abstract
⺠Crystalline SiNx grew coherently with TiAlN, improving the hardness of coating. ⺠Densified microstructure with amorphous SiNx exhibited higher corrosion resistance. ⺠Tunable properties in coatings were obtained through the structure control of SiNx.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Yu-Chen Chan, Hsien-Wei Chen, Pen-Shen Chao, Jenq-Gong Duh, Jyh-Wei Lee,