Article ID Journal Published Year Pages File Type
8045508 Vacuum 2013 5 Pages PDF
Abstract
► AZO films are fabricated by ion beam co-sputtering. ► Heat treatment disorders the crystalline structure and reduces residual stress of the AZO film. ► Electric properties of the AZO film are stable below post-annealing temperature 200 °C. ► Band gaps vary from 3.81 to 3.49 eV as annealing temperature up to 400 °C.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Post-annealing properties of aluminum-doped zinc oxide films fabricated by ion beam co-sputtering
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