A newly developed STM-based coordinate measuring machine

Demands for precision measurement of three dimensional micro-geometries over a large area have recently increased in a variety of industries. In order to meet such requirements, it is necessary to develop a novel coordinate measuring machine (CMM) which has high resolution together with larger than 10 mm scale measuring range. This paper presents a newly developed CMM with nanometer spatial resolution based on a scanning tunneling microscopy principle. The developed CMM is composed of a planar nano-motion control system driven by voice coil motors and a vertical nano-motion system driven by a hybrid actuator. Furthermore, in order to achieve long-term stability and repeatability, the machine is installed on an active vibration isolating system inside a temperature-controlled enclosure. Performance evaluation results confirm that the CMM has nanometer spatial resolution, large measuring range and high structural stability.

Graphical abstractA novel coordinate measuring machine (CMM) with nanometer spatial resolution and larger than 10 mm scale measuring range.Figure optionsDownload full-size imageDownload as PowerPoint slideHighlights► The STM-based CMM based on an ideal structural concept was developed. ► The developed system provides high measuring stability. ► The system has a nanometer scale measuring resolution. ► The variation of the measured height among 20 measurements was 4.6 nm. ► Shapes of a steel sphere and an aspheric lens mold could be obtained by the system.