Rapid prototyping of packaged glass devices: Eliminating a process step in the manufacturing workflow from micromachining to die singularizing

Direct glass-to-glass bonding after micro-patterning in glass is often challenging, especially in the frame of rapid prototyping, as several special cleaning or other post-processing steps are needed before bonding is possible. In this study, we demonstrate that glass-to-glass bonding is possible directly after Spark Assisted Chemical Engraving (SACE) micromachining without any special post-treatments. This approach enables flexible prototyping of glass devices at relatively low cost, which is illustrated by fabrication of functional microfluidic devices. The machined and bonded glass device is evaluated both qualitatively and quantitatively on performance and shows good results.