Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
805220 | Precision Engineering | 2011 | 4 Pages |
Abstract
We show that covering the water-saturated MgO surface with an Al2O3 film using atomic layer deposition and then annealing it at 400 °C leads to plastic deformation of alumina by trapped water vapor with consequent development of hollow structures. This phenomenon is applied to thin films, nanopatterned surfaces and isolated 3D nanostructures.
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Authors
A. Zolotaryov, J. Bachmann, J.M. Montero-Moreno, K. Pitzschel, K. Nielsch,