| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 807803 | Sensing and Bio-Sensing Research | 2015 | 6 Pages |
A novel cantilever array-based bio-sensor was batch-fabricated with IC compatible MEMS technology for precise liver cancer bio-marker detection. A micro-cavity was designed in the free end of the cantilever for local antibody-immobilization, thus adsorption of the cancer biomarker is localized in the micro-cavity, and the adsorption-induced k variation can be dramatically reduced with comparison to that caused by adsorption of the whole lever. The cantilever is pizeoelectrically driven into vibration which is pizeoresistively sensed by Wheatstone bridge. These structural features offer several advantages: high sensitivity, high throughput, high mass detection accuracy, and small volume. In addition, an analytical model has been established to eliminate the effect of adsorption-induced lever stiffness change and has been applied to precise mass detection of cancer biomarker AFP, the detected AFP antigen mass (7.6 pg/ml) is quite close to the calculated one (5.5 pg/ml), two orders of magnitude better than the value by the fully antibody-immobilized cantilever sensor. These approaches will promote real application of the cantilever sensors in early diagnosis of cancer.
