Wide wavelength range tunable guided-mode resonance filters based on incident angle rotation for all telecommunication bands

The comparison among one-layer, two-layer and three-layer guided-mode resonance filters (GMRFs) has been discussed by the numerical simulations. The rigorous coupled-wave analysis (RCWA) is used to calculate the reflection spectra of the designed GMRFs. As the reflection sidebands of two-layer GMRFs are not satisfactory, tunable three-layer GMRFs for all telecommunication bands have been designed and fabricated. The grating structures of the GMRFs are patterned by interference lithography with two ultraviolet laser beams. The reflection spectra of the GMRF samples at different incident angles are measured by rotating a motorized stage. The negative first-order diffraction resonances located at 1701.4, 1549.3, 1424.4 1309.5, and 1188.9 nm are measured at the incident angles of 3°, 11.4°, 20°, 30.2°, and 45°, respectively. The experimental results are in good agreement with the theoretical simulation ones. We show experimentally a large spectral shift over 510 nm of wavelength that covers all telecommunication bands.