Analysis of screw dislocation mediated dark current in Al0.50Ga0.50N solar-blind metal-semiconductor-metal photodetectors

We report on a billion-fold reduction in reverse-bias leakage current density (11.3 A/cm2 to 8.5 nA/cm2 at 20 V) across Schottky contacts made to Al0.50Ga0.50N epilayers grown on sapphire. Interdigitated back-to-back Ni/Au Schottky contacts were made to unintentionally doped Al0.50Ga0.50N epilayers grown by metal organic chemical vapor deposition to realize photodetectors with metal-semiconductor-metal geometry. Testing on a self-consistent series of samples grown under different conditions revealed that a two-order reduction in screw dislocation density is primarily responsible for the significant reduction in the lateral leakage (dark) current. This observation is validated by conductive atomic force microscopy experiments. Analytical modelling by temperature-dependent current-voltage measurements confirm a screw dislocation mediated carrier transport mechanism. The anomalously high reverse-bias leakage current (μA-mA) in the highly defective samples is found to be dominated by thermionic field emission (TFE) at low biases and Poole-Frenkel emission (PFE) from a deep donor level at high biases. With a significant improvement in the crystalline quality, a solar-blind photodetector with an EQE of 47%, photo/dark current ratio of 1.4 × 105 and transient characteristics of <20 ms is demonstrated. This study towards understanding the leakage in Al0.50Ga0.50N is expected to benefit the development of various deep-UV devices and GaN-AlGaN based power transistors.