Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8148521 | Journal of Crystal Growth | 2018 | 17 Pages |
Abstract
In this paper we report about the formation of ultra heavy doped n-Ge layers on Si(0â¯0â¯1) substrates by molecular beam epitaxy and their characterization by different independent techniques. Combined study of structural and electrical properties of fabricated layers using secondary ion mass spectroscopy, X-ray diffraction, Hall effect and reflection measurements was carried out and it has revealed the achievable charge carrier densities exceeding 1020â¯cmâ3 without deterioration of crystalline quality of such doped layers. It was also shown that X-ray analysis can be used as a fast, reliable and non-destructive method for evaluation of the electrically active Sb concentration in heavy doped Ge layers. The appropriate set of doping density allowed to adjust the plasmonic resonance position in Ge:Sb layers in a rather wide range reaching the wavelength of 3.6â¯Î¼m for the highest doping concentration. Room temperature photoluminescence confirmed the high crystalline quality of such doped layers. Our results indicated the attainability of high electron concentration in Ge:Sb layers grown on Si substrates without crystalline quality deterioration which may find potential applications in the fields of Si-based photonics and mid-IR plasmonics.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
D.V. Yurasov, A.V. Antonov, M.N. Drozdov, P.A. Yunin, B.A. Andreev, P.A. Bushuykin, N.A. Baydakova, A.V. Novikov,