Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8148639 | Journal of Crystal Growth | 2018 | 9 Pages |
Abstract
With the rapid development of the photovoltaic industry, pressurized Siemens belljar-type polysilicon CVD reactors have been enlarged from 24 rods to 96 rods in less than 10 years aimed at much greater single-reactor productivity. A CFD model of an industry-scale 96-rod CVD reactor was established to study the internal temperature distribution and the flow field of the reactor. Numerical simulations were carried out and compared with actual growth results from a real CVD reactor. Factors affecting polysilicon depositions such as inlet gas injections, flow field, and temperature distribution in the CVD reactor are studied.
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Authors
Tang Guoqiang, Chen Cong, Cai Yifang, Zong Bing, Cai Yanguo, Wang Tihu,