Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8148969 | Journal of Crystal Growth | 2018 | 20 Pages |
Abstract
We investigate the types and origins of structural defects in thin (<100â¯Âµm) kerfless epitaxial single crystal silicon grown on top of reorganized porous silicon layers. Although the structural defect density is low (has average defect densityâ¯<â¯104â¯cmâ2), localized areas with a defect densityâ¯>â¯105â¯cmâ2 are observed. Cross-sectional and systematic plan-view defect etching and microscopy reveals that the majority of stacking faults and dislocations originate at the interface between the porous silicon layer and the epitaxial wafer. Localised dislocation clusters are observed in regions of collapsed/deformed porous silicon and at decorated stacking faults. In localized regions of high extended defect density, increased minority-carrier recombination activity is observed. Evidence for impurity segregation to the extended defects (internal gettering), which is known to exacerbate carrier recombination is demonstrated. The impact of the defects on material performance and substrate re-use is also discussed.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Maulid M. Kivambe, Douglas M. Powell, Sergio Castellanos, Mallory Ann Jensen, Ashley E. Morishige, Barry Lai, Ruiying Hao, T.S. Ravi, Tonio Buonassisi,