| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8151218 | Journal of Crystal Growth | 2014 | 5 Pages |
Abstract
We report about a MOVPE parameter study carried out on a Planetary Reactor to determine factors that govern the incorporation efficiency of aluminum and gallium into AlxGa1âxN, hence its solid composition x and growth rate. Parameter variations include pressure, flow rate, wafer and ceiling temperature, V-III-ratio, and Al/(Al+Ga) inlet ratio. The target composition is 0.15
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Martin Dauelsberg, Daniel Brien, Hendrik Rauf, Fabian Reiher, Johannes Baumgartl, Oliver Häberlen, Alexander S. Segal, Anna V. Lobanova, Eugene V. Yakovlev, Roman A. Talalaev,